AWM5000 Series 规格书

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Airflow Sensors AWM5000 Series
High Flow Mass Airflow/Amplified
Honeywell1 Sensing and Control11-800-537-6945 USA1F1-815-235-6847 International11-800-737-3360 Canada
79
In-Line Flow Measurement
AWM5000 Series Microbridge Mass Air-
flow Sensors feature a venturi type flow
housing. They measure flow as high as 20
standard liters per minute (SLPM) while
inducing a maximum pressure drop of
2.25NH2O. The microbridge chip is in di-
rect contact with the flow stream, greatly
reducing error possibilities due to orifice
or bypass channel clogging.
Rugged, Versatile Package
The rugged plastic package has been
designed to withstand common mode
pressures up to 50 psi, and the small
sensing element allows 100 gs of shock
without compromising performance. The
included ‘‘AMP’’ compatible connector
provides reliable connection in demand-
ing applications.
On-board Signal Conditioning
Each AWM5000 sensor contains circuitry
which performs amplification, lineariza-
tion, temperature compensation, and gas
calibration. Figure 1 (Heater Control Cir-
cuit) and Figure 2 (Sensor Bridge Circuit
and Amplification Linearization Circuit) il-
lustrate the on-board electrical circuitry
for the AWM5000 Series. A 1 to 5 VDC
linear output is possible for all listings
regardless of flow range (5, 10, 15, or 20
SLPM) or calibration gas (nitrogen, car-
bon dioxide, nitrous oxide, or argon). All
calibration is performed by active laser
trimming.
FEATURES
1Linear voltage output
1Venturi design
1Remote mounting capability
1Active laser trimming improves inter-
change ability
1Separate gas calibration types:
– Ar (argon)
– N2(nitrogen) or
– CO2(carbon dioxide)
Figure 1
Figure 2
Airflow
SPECIFICATIONS (Performance Characlerislics @10.0 :0.01 VDC, 25 C) AWMSIDI AWM5102 AWM5103 AWMSIDd
Airflow Sensors AWM5000 Series
Highflow Mass Airflow/Amplified
80
Honeywell1 Sensing and Control11-800-537-6945 USA1F1-815-235-6847 International11-800-737-3360 Canada
SPECIFICATIONS (Performance Characteristics @10.0 ±0.01 VDC, 25°C)
AWM5101 AWM5102 AWM5103 AWM5104
Flow Range (Note 3) 0-5 SLPM 0-10 SLPM 0-15 SLPM 0-20 SLPM
Suffix - Calibration gas VA - Argon (Ar) VC - Carbon dioxide (CO2)VN - Nitrogen (N2)
Min. Typ. Max.
Excitation VDC 8 10±0.01 15
Power consumption (mW) — — 100
Response time (msec) — — 60
Null output VDC 0.95 1 1.05
Null output shift
−20°to 70°C— ±0.050 VDC ±.200 VDC
Common Mode
Pressure (psi) — — 50
Temperature range −20°to +70°C, (−4°to 158°F)
Weight 60 grams (2.12 oz.)
Shock ratings 100 g peak, 6 msec half-sine (3 drops, each direction of 3 axes)
Output @ laser trim point 5 VDC @ Full Scale Flow
Output voltage shift
+20°to −25°C, +20°to 70°C Suffix VA or VN ±7.0% Reading, Suffix VC ±10.0% Reading
Linearity error (2) ±3.0% Reading (max.)
Repeatability & Hysteresis ±0.5% Reading (max.)
Connector (Included)
—Four pin receptacle MICRO SWITCH (SS12143)/AMP (103956-3)
Leak rate, max 0.1 psi/min. at static condition, (Note 2)
Notes:
1. Linearity specification applies from 2 to 100% full scale of gas flow range, and does not apply to null output at 0 SLPM.
2. The AWM5000 series product has a leakage spec of less than 0.1 psi per minute at 50 psi common mode pressure. If during installation, the
end adapters are twisted with respect to the flowtube, this may compromise the seal between the o-ring and the flowtube and may cause a
temporary leak. This leak might be as high as 1 psi or might remain in specification. It will self-reseal as the o-ring takes a new set.
Approximately 85% of the leakage will dissipate in 24 hours. Within 48 hours, complete recovery will take place.
3. SLPM denotes standard liters per minute, which is a flow measurement referenced to standard conditions of 0°C/1 bar (sea level), 50% RH.
NOTICE
AWM5000—Chimney Effect
AWM microbridge mass airflow sensors detect mass airflow caused by heat transfer. The thermally isolated
microbridge structure consists of a heater resistor positioned between two temperature sensing resistors.
The heater resistor maintains a constant temperature, 160°C above ambient, during sensor operation. Airflow
moving past the chip transfers heat from the heater resistor. This airflow warms the downstream resistor and
cools the upstream resistor. The temperature change and the resulting change in resistance of the
temperature resistors is proportional to the mass airflow across the sensing element.
When the sensor is mounted in a vertical position, under zero flow conditions, the sensor may produce an
output that is the result of thermally induced convection current. This occurrence is measurable in the
AWM5000 Series, particularly in the 5 SLPM versions. When designing the sensor into applications where null
stability is critical, avoid mounting the sensor in a vertical position.
Pmsurc (' H20) 5.0 100 Prusm vs MawFlow Mus-Flow (SLPM) AWM5101V Series AWM5102V Serles 1~5 VDC Llnelr Output 1-5 VDO Llnur Output 6 Output Vomgo vs Flow Output Volt-go vs Flow 2 i E, i 3 5 2 0 I 0 0 0 1 2 3 4 5 0 2 4 6 8 IO Mus~Flow (SLPM) Mus—Flow SLPM Nom na In. Max. Nominal ------ Min/Max AWM5103V Serlcs AWM5104V 1-5 we Linear ampux 1-5 Llnear Output! 6 Output Voltage vs Flow 6 output Volt-go vs Flow ,— 5 A 5 S 4 8 4 a 2, s a s a g- 2 g- 2 o ‘ 0 I 0 0 0,0 2,5 5,0 7 5 10,0 12,5 159 0.0 2.5 5.0 7.5 “3.0 12.5 15.0 ‘75 20.0 Miss-Flaw (SLPM) Mass-Flow (SLPM) AWMSOOO Series 15.0 20.0
Airflow Sensors AWM5000 Series
High Flow Mass Airflow/Amplified
Honeywell1Sensing and Control11-800-537-6945 USA1F1-815-235-6847 International11-800-737-3360 Canada
81
OUTPUT CURVES (Performance Characteristics @10.0 ±0.01 VDC, 25°C)
Airflow
AWMSODD ORDER GUIDE AWM5104VN CONNECTOR ORDER GUIDE 20 —RING SEAL 20 SLM FLow (PRODUCT LENGYHI
Airflow Sensors AWM5000 Series
Highflow Mass Airflow/Amplified
82
Honeywell1 Sensing and Control11-800-537-6945 USA1F1-815-235-6847 International11-800-737-3360 Canada
AWM5000 ORDER GUIDE
Catalog Listing Flow Range
AWM5101VA 5 SLPM, Argon calibration
AWM5101VC 5 SLPM, CO2calibration (2)
AWM5101VN 5 SLPM, N2calibration (1)
AWM5102VA 10 SLPM, Argon calibration
AWM5102VC 10 SLPM, CO2calibration (2)
AWM5102VN 10 SLPM, N2calibration (1)
AWM5103VA 15 SLPM, Argon calibration
AWM5103VC 15 SLPM, CO2calibration (2)
AWM5103VN 15 SLPM, N2calibration (1)
AWM5104VA 20 SLPM, Argon calibration
AWM5104VC 20 SLPM, CO2calibration (2)
AWM5104VN 20 SLPM, N2calibration (1)
CONNECTOR ORDER GUIDE
Catalog Listing Description
SS12143 Four pin Electrical connector
Connectors use Amp 103956-3
Note: All listings have 1 - 5 VDC linear output with 10 VDC supply over given flow range for a
specific calibration gas.
1. N2calibration is identical to 02and air calibration.
2. CO2calibration is identical to N2O calibration.
3. For additional gas correction factors, see Application Note 3.
OUTPUT CONNECTIONS
Pin 1 +Supply voltage
Pin 2 Ground
Pin 3 No connection
Pin 4 Output voltage
Arrow on bottom of housing indicates direction of flow.
MOUNTING DIMENSIONS (for reference only)