Analog Devices Inc. 的 ADXRS620 规格书

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ANALOG DEVICES =300°lsec Yaw Rate 6er ADXRSBZO

±300°/sec Yaw Rate Gyro

ADXRS620

Rev. B

Information furnished by Analog Devices is believed to be accurate and reliable. However, no

responsibility is assumed by Analog Devices for its use, nor for any infringements of patents or other

rights of third parties that may result from its use. Specifications subject to change without notice. No

license is granted by implication or otherwise under any patent or patent rights of Analog Devices.

Trademarks and registered trademarks are the property of their respective owners.

One Technology Way, P.O. Box 9106, Norwood, MA 02062-9106, U.S.A.

Tel: 781.329.4700 www.analog.com

FEATURES

Qualified for automotive applications

Complete rate gyroscope on a single chip

Z-axis (yaw rate) response

High vibration rejection over wide frequency

2000 g powered shock survivability

Ratiometric to referenced supply

5 V single-supply operation

105°C operation

Self-test on digital command

Ultrasmall and light (<0.15 cc, <0.5 gram)

Temperature sensor output

RoHS compliant

APPLICATIONS

Vehicle chassis rollover sensing

Inertial measurement units

Platform stabilization

GENERAL DESCRIPTION

The ADXRS620 is a complete angular rate sensor (gyroscope)

that uses the Analog Devices, Inc., surface-micromachining

process to create a functionally complete and low cost angular

rate sensor integrated with all required electronics on one chip.

The manufacturing technique for this device is the same high

volume BiMOS process that is used for high reliability automotive

airbag accelerometers.

The ADXRS620 is an automotive grade gyroscope that is 100%

pin, package, temperature, and function compatible to the

available industrial grade ADXRS652 gyro. Automotive grade

gyroscopes have more extensive guaranteed minimum/maximum

specifications due to automotive testing.

The output signal, RATEOUT (1B, 2A), is a voltage that is

proportional to angular rate about the axis normal to the top

surface of the package. The output is ratiometric with respect

to a provided reference supply. An external capacitor sets the

bandwidth. Other external capacitors are required for operation.

A temperature output is provided for compensation techniques.

Two digital self-test inputs electromechanically excite the sensor

to test proper operation of both the sensor and the signal condi-

tioning circuits. The ADXRS620 is available in a 7 mm × 7 mm ×

3 mm BGA ceramic package.

FUNCTIONAL BLOCK DIAGRAM

AGND

PGND

ST2 ST1 TEMP V

RATIO

CP1 CP2 CP3 CP4 CP5 SUMJ RATEOUT

DEMOD

180kΩ ±1%

22nF 100nF

22nF

100nF

DRIVE

AMP

MECHANICAL

SENSOR

CHARGE PUMP

AND VOLTAGE

REGULATOR

OUT

+5V

(ADC REF)

AMP

VGA

25kΩ

@ 25°C

ADXRS620

25kΩ

SELF-TEST

08887-001

Figure 1.

ADXRS620

Rev. B | Page 2 of 12

TABLE OF CONTENTS

Features .............................................................................................. 1

Applications ....................................................................................... 1

General Description ......................................................................... 1

Functional Block Diagram .............................................................. 1

Revision History ............................................................................... 2

Specifications ..................................................................................... 3

Absolute Maximum Ratings ............................................................ 4

Rate Sensitive Axis ....................................................................... 4

ESD Caution .................................................................................. 4

Pin Configuration and Function Descriptions ............................. 5

Typical Performance Characteristics ............................................. 6

Theory of Operation ........................................................................ 9

Setting Bandwidth .........................................................................9

Temperature Output and Calibration .........................................9

Calibrated Performance ................................................................9

ADXRS620 and Supply Ratiometricity ................................... 10

Null Adjustment ......................................................................... 10

Self-Test Function ...................................................................... 10

Continuous Self-Te st .................................................................. 10

Outline Dimensions ....................................................................... 11

Ordering Guide .......................................................................... 11

Automotive Products ................................................................. 11

REVISION HISTORY

9/10—Rev. A to Rev. B

Changes to Ordering Guide .......................................................... 11

7/10—Rev. 0 to Rev. A

Changes to Features Section and General Description Section . 1

Added Note 2 to Ordering Guide ................................................. 11

Added Automotive Products Section........................................... 11

3/10—Revision 0: Initial Version

ADXRS620

Rev. B | Page 3 of 12

SPECIFICATIONS

All minimum and maximum specifications are guaranteed. Typical specifications are not guaranteed. TA = −40°C to +105°C, VS = AVCC =

VDD = 5 V, V RATIO = AVCC, angular rate = 0°/sec, bandwidth = 80 Hz (COUT = 0.01 µF), IOUT = 100 μA, ±1 g, unless otherwise noted.

Table 1.

Parameter Conditions Min Typ Max Unit

SENSITIVITY1Clockwise rotation is positive output

Measurement Range2 Full-scale range over specifications range ±300 °/sec

Initial and Over Temperature −40°C to +105°C 5.52 6 6.48 mV/°/sec

Temperature Drift3 ±2 %

Nonlinearity Best fit straight line 0.1 % of FS

NULL1

Null −40°C to +105°C 2.2 2.5 2.8 V

Linear Acceleration Effect Any axis 0.1 °/sec/g

NOISE PERFORMANCE

Rate Noise Density TA ≤ 25°C 0.05 °/sec/√Hz

FREQUENCY RESPONSE

Bandwidth4 0.01 2500 Hz

Sensor Resonant Frequency 12 14.5 17 kHz

SELF-TEST1

ST1 RATEOUT Response ST1 pin from Logic 0 to Logic 1 −650 −450 −250 mV

ST2 RATEOUT Response ST2 pin from Logic 0 to Logic 1 250 450 650 mV

ST1 to ST2 Mismatch5 −5 +5 %

Logic 1 Input Voltage 3.3 V

Logic 0 Input Voltage 1.7 V

Input Impedance To common 40 50 100 kΩ

TEMPERATURE SENSOR1

VOUT at 25°C Load = 10 MΩ 2.35 2.5 2.65 V

Scale Factor6 @ 25°C, VRATI O = 5 V 9 mV/°C

Load to VS 25 kΩ

Load to Common 25 kΩ

TURN-ON TIME Power on to ±½°/sec of final 50 ms

OUTPUT DRIVE CAPABILITY

Current Drive For rated specifications 200 µA

Capacitive Load Drive 1000 pF

POWER SUPPLY

Operating Voltage (VS) 4.75 5.00 5.25 V

Quiescent Supply Current 3.5 4.5 mA

TEMPERATURE RANGE

Specified Performance −40 +105 °C

1 Parameter is linearly ratiometric with VRATIO.

2 The maximum range possible, including output swing range, initial offset, sensitivity, offset drift, and sensitivity drift at 5 V supplies.

3 From +25°C to −40°C or from +25°C to 105°C.

4 Adjusted by external capacitor, COUT. Reducing bandwidth below 0.01 Hz does not reduce noise further.

5 Self-test mismatch is described as (ST2 + ST1)/((ST2 − ST1)/2).

6 For a change in temperature from 25°C to 26°C. VTEMP is ratiometric to VRATIO. See the Temperature Output and Calibration section for more details.

m2 ESD (ele‘lvoshtiz discharge) sensitive devi‘e. Charged devwces and mm board: (an mschmge wnhom daemon Mmough nus pmdun «same: pammcd av pmpvmmry pmmmon tummy, damage may occuv on dame: summed m mgh enevgy ESD Thevefore, pmpel ESD pvemulmns 5mm be mken m avoid pevvovmance degradauon ov ‘03: of iuncnonaﬁry

ADXRS620

Rev. B | Page 4 of 12

ABSOLUTE MAXIMUM RATINGS

Table 2.

Parameter Rating

Acceleration (Any Axis, 0.5 ms)

Unpowered 2000 g

Powered 2000 g

VDD, AVCC −0.3 V to +6.0 V

VRATIO AVCC

ST1, ST2 AVCC

Output Short-Circuit Duration

(Any Pin to Common)

Indefinite

Operating Temperature Range −55°C to +125°C

Storage Temperature Range −65°C to +150°C

Stresses above those listed under the Absolute Maximum

Ratings may cause permanent damage to the device. This is a

stress rating only; functional operation of the device at these or

any other conditions above those indicated in the operational

section of this specification is not implied. Exposure to absolute

maximum rating conditions for extended periods may affect

device reliability.

Drops onto hard surfaces can cause shocks of greater than

2000 g and can exceed the absolute maximum rating of the

device. Exercise care during handling to avoid damage.

RATE SENSITIVE AXIS

The ADXRS620 is a Z-axis rate-sensing device (also called

a yaw rate sensing device). It produces a positive going output

voltage for clockwise rotation about the axis normal to the

package top, that is, clockwise when looking down at the

package lid.

RATE

AXIS

LONGITUDINAL

AXIS

LATERAL AXIS

A B C D G 1

E F

RATE OUT

RATE IN

4.75V

0.25V

= 5V

RATIO

GND

08887-002

Figure 2. RATEOUT Signal Increases with Clockwise Rotation

ESD CAUTION

‘00000" \b 000 C5 00 OO 00 @ 00 OO 00 P 000 o ,00000‘9

ADXRS620

Rev. B | Page 5 of 12

PIN CONFIGURATION AND FUNCTION DESCRIPTIONS

PGND

ST1

ST2

TEMP

AGND V

RATIO

NC SUMJ RATEOUT

CP2

CP1

CP4

CP3CP5V

G F E D C B A

08887-003

Figure 3. Pin Configuration

Table 3. Pin Function Descriptions

Pin No. Mnemonic Description

6D, 7D CP5 HV Filter Capacitor (0.1 µF)

6A, 7B CP4 Charge Pump Capacitor (22 nF)

6C, 7C CP3 Charge Pump Capacitor (22 nF)

5A, 5B CP1 Charge Pump Capacitor (22 nF)

4A, 4B CP2 Charge Pump Capacitor (22 nF)

3A, 3B AVCC Positive Analog Supply

1B, 2A RATEOUT Rate Signal Output

1C, 2C SUMJ Output Amp Summing Junction

1D, 2D NC No Connect

1E, 2E VRATIO Reference Supply for Ratiometric Output

1F, 2G AGND Analog Supply Return

3F, 3G TEMP Temperature Voltage Output

4F, 4G ST2 Self-Test for Sensor 2

5F, 5G ST1 Self-Test for Sensor 1

6G, 7F PGND Charge Pump Supply Return

6E, 7E VDD Positive Charge Pump Supply

ADXRS620

Rev. B | Page 6 of 12

TYPICAL PERFORMANCE CHARACTERISTICS

N > 1000 for all typical performance plots, unless otherwise noted.

2.20

2.25

2.30

2.35

2.40

2.45

2.80

2.75

2.70

2.65

2.60

2.55

2.50

PERCENTAGE OF POPULATION (%)

RATE OUT (V)

08887-004

Figure 4. Null Output at 25°C (VRATIO = 5 V)

–0.5 –0.4 –0.3 –0.2 –0.1 00.1 0.2 0.3 0.4 0.5

PERCENTAGE OF POPULATION (%)

(°/sec°/C)

08887-005

Figure 5. Null Drift over Temperature (VRATIO = 5 V)

% OF POPULATION

SENSITIVITY (mV/°/sec)

08887-006

5.5 5.6 5.7 5.8 5.9 66.1 6.56.46.36.2

Figure 6. Sensitivity at 25°C (VRATIO = 5 V)

0–10 –8 –6 –4 –2 0 2 4 6 8 10

PERCENTAGE OF POPULATION (%)

DRIFT (%)

08887-007

Figure 7. Sensitivity Drift over Temperature

–650 –610 –570 –530 –490 –450 –410 –370 –330 –290 –250

PERCENTAGE OF POPULATION (%)

ST1 Δ (mV)

08887-008

Figure 8. ST1 Output Change at 25°C (VRATIO = 5 V)

PERCENTAGE OF POPULATION (%)

ST2 Δ (mV)

08887-009

250 290 330 370 410 450 490 650610570530

Figure 9. ST2 Output Change at 25°C (VRATIO = 5 V)

ADXRS620

Rev. B | Page 7 of 12

0–5 –4 –3 –2 –1 543210

PERCENTAGE OF POPULATION (%)

SELF-TEST MISMATCH (%)

08887-010

Figure 10. Self-Test Mismatch at 25°C (VRATIO = 5 V)

600

400

200

–600

–400

–200

–40 –20 020 40 80 100 12060

SELF-TEST Δ (mV)

TEMPERATURE (°C)

ST1

ST2

08887-011

Figure 11. Typical Self-Test Change over Temperature

2.5 2.7 2.9 3.1 3.3 3.5 3.7 3.9 4.1 4.3 4.5

PERCENTAGE OF POPULATION (%)

CURRENT CONSUMPTION (m A)

08887-012

Figure 12. Current Consumption at 25°C (VRATIO = 5 V)

2.40 2.42 2.44 2.46 2.48 2.50 2.54 2.56 2.58 2.602.52

PERCENTAGE OF POPULATION (%)

VOLTAGE (V)

08887-015

Figure 13. VTEMP Output at 25°C (VRATIO = 5 V)

3.3

3.1

2.9

2.7

1.5

2.1

1.9

1.7

2.3

2.5

–40 –20 020 40 60 100 12080

VOLTAGE (V)

TEMPERATURE (°C)

256 PARTS

08887-013

Figure 14. VTEMP Output over Temperature (VRATIO = 5 V)

–20

–10

750 770 810 830 850790

g OR °/sec

TIME (ms)

REF

+45°

–45°

08887-014

Figure 15. g and g × g Sensitivity for a 50 g, 10 ms Pulse

mm orrsy av mam: nun orrsy av 400mm:

ADXRS620

Rev. B | Page 8 of 12

0.2

0.4

0.6

0.8

1.0

1.2

1.6

2.0

1.4

1.8

1001k 10k

PEAK RATEOUT (°/s)

FREQUENCY (Hz)

LAT

LONG

RATE

08887-116

Figure 16. Typical Response to 10 g Sinusoidal Vibration

(Sensor Bandwidth = 2 kHz)

400

300

200

100

–100

–200

–300

–400 0250150100 20050

TIME (ms)

RATE OF ROTATION (°/sec)

DUT1 OFFSET BY +200°/sec

DUT2 OFFSET BY –200°/sec

08887-016

Figure 17. Typical High g (2500 g) Shock Response

(Sensor Bandwidth = 40 Hz)

0.1

0.01

0.001

0.01 0.1 100k10k1k100101

AVERAGE TIME (Seconds)

ROOT ALLAN DEVIATION (°/sec rms)

08887-017

Figure 18. Typical Root Allan Deviation at 25°C vs. Averaging Time

0.10

–0.05

0.05

–0.10 014012010080604020

TIME (Hours)

RATE OF ROTATION (°/sec)

08887-018

Figure 19. Typical Shift in 90 sec Null Averages Accumulated

over 140 Hours

0.10

0.05

–0.05

–0.10 0360018001200 30002400600

TIME (Seconds)

RATE OF ROTATION (°/sec)

08887-019

Figure 20. Typical Shift in Short-Term Null (Bandwidth = 1 Hz)

0.1

0.001

0.01

0.000110 100k1k100

FREQUENCY (Hz)

NOISE SPECTRAL DENSITY(°/sec/√Hz rms)

10k

08887-020

Figure 21. Typical Noise Spectral Density (Bandwidth = 40 Hz)

ADXRS620

Rev. B | Page 9 of 12

THEORY OF OPERATION

The ADXRS620 operates on the principle of a resonator gyro.

Two polysilicon sensing structures each contain a dither frame

that is electrostatically driven to resonance, producing the

necessary velocity element to produce a Coriolis force during

angular rate. At two of the outer extremes of each frame,

orthogonal to the dither motion, are movable fingers that are

placed between fixed pickoff fingers to form a capacitive pickoff

structure that senses Coriolis motion. The resulting signal is fed

to a series of gain and demodulation stages that produces the

electrical rate signal output. The dual-sensor design rejects

external g-forces and vibration. Fabricating the sensor with the

signal conditioning electronics preserves signal integrity in

noisy environments.

The electrostatic resonator requires 18 V to 20 V for operation.

Because only 5 V are typically available in most applications,

a charge pump is included on chip. If an external 18 V to 20 V

supply is available, the two capacitors on CP1 through CP4 can

be omitted and this supply can be connected to CP5 (Pin 6D,

Pin 7D). Note that CP5 should not be grounded when power is

applied to the ADXRS620. Although no damage occurs, under

certain conditions the charge pump may fail to start up after the

ground is removed without first removing power from the

ADXRS620.

SETTING BANDWIDTH

External Capacitor COUT is used in combination with the on-

chip ROUT resistor to create a low-pass filter to limit the

bandwidth of the ADXRS620 rate response. The −3 dB

frequency set by ROUT and COUT is

( )

OUTOUT

f×××

=π2

This frequency can be well controlled because ROUT has been

trimmed during manufacturing to be 180 kΩ ± 1%. Any

external resistor applied between the RATEOUT pin (1B, 2A)

and SUMJ pin (1C, 2C) results in

( )

EXT

R+

=kΩ180

kΩ180

In general, an additional hardware or software filter is added

to attenuate high frequency noise arising from demodulation

spikes at the gyro’s 14 kHz resonant frequency. (The noise spikes

at 14 kHz can be clearly seen in the power spectral density curve

shown in Figure 21). Typically, this additional filter’s corner

frequency is set to greater than 5× the required bandwidth to

preserve good phase response.

Figure 22 shows the effect of adding a 250 Hz filter to the output

of an ADXRS620 set to 40 Hz bandwidth (as shown in Figure 21).

High frequency demodulation artifacts are attenuated by

approximately 18 dB.

0.1

0.01

0.000001

0.00001

0.0001

0.001

10 100k1k100

FREQUENCY (Hz)

NOISE SPECTRAL DENSITY(°/sec/√Hz rms)

10k

08887-021

Figure 22. Noise Spectral Density with Additional 250 Hz Filter

TEMPERATURE OUTPUT AND CALIBRATION

It is common practice to temperature-calibrate gyros to improve

their overall accuracy. The ADXRS620 has a temperature propor-

tional voltage output that provides input to such a calibration

method. The temperature sensor structure is shown in Figure 23.

The temperature output is characteristically nonlinear, and any

load resistance connected to the TEMP output results in decreasing

the TEMP output and temperature coefficient. Therefore, buf-

fering the output is recommended.

The voltage at the TEMP pin (3F, 3G) is nominally 2.5 V at 25°C,

and VRATIO = 5 V. T h e temperature coefficient is ~9 mV/°C at

25°C. Although the TEMP output is highly repeatable, it has

only modest absolute accuracy.

RATIO

TEMP

FIXED

TEMP

08887-022

Figure 23. Temperature Sensor Structure

CALIBRATED PERFORMANCE

Using a three-point calibration technique, it is possible to

calibrate the null and sensitivity drift of the ADXRS620 to

an overall accuracy of nearly 200°/hour. An overall accuracy

of 40°/hour or better is possible using more points.

Limiting the bandwidth of the device reduces the flat-band

noise during the calibration process, improving the measure-

ment accuracy at each calibration point.

5 mm 5 mm

ADXRS620

Rev. B | Page 10 of 12

ADXRS620 AND SUPPLY RATIOMETRICITY

The ADXRS620 RATEOUT and TEMP signals are ratiometric

to the VRATIO voltage, that is, the null voltage, rate sensitivity, and

temperature outputs are proportional to VRATIO. Thus, the

ADXRS620 is most easily used with a supply-ratiometric ADC

that results in self-cancellation of errors due to minor supply

variations. There is some small error due to nonratiometric

behavior. Typical ratiometricity error for null, sensitivity, self-

test, and temperature output is outlined in Table 4.

Note that VRATIO must never be greater than AVCC.

Table 4. Ratiometricity Error for Various Parameters

Parameter VS = VRAT IO = 4.85 V VS = VRATI O = 5.15 V

ST1

Mean 0.3% 0.09%

Sigma 0.21% 0.19%

ST2

Mean −0.15% −0.2%

Sigma 0.22% 0.2%

Null

Mean −0.3% −0.05%

Sigma 0.2% 0.08%

Sensitivity

Mean 0.003% −0.25%

Sigma 0.06% 0.06%

VTEMP

Mean −0.2% −0.04%

Sigma 0.05% 0.06%

NULL ADJUSTMENT

The nominal 2.5 V null is for a symmetrical swing range at

RATEOUT (1B, 2A). However, a nonsymmetrical output swing

may be suitable in some applications. Null adjustment is possible

by injecting a suitable current to SUMJ (1C, 2C). Note that supply

disturbances may reflect some null instability. Digital supply

noise should be avoided, particularly in this case.

SELF-TEST FUNCTION

The ADXRS620 includes a self-test feature that actuates each of

the sensing structures and associated electronics as if subjected

to angular rate. It is activated by standard logic high levels applied

to Input ST1 (5F, 5G), Input ST2 (4F, 4G), or both. ST1 causes

the voltage at RATEOUT to change about −0.450 V, and ST2

causes an opposite change of +0.450 V. The self-test response

follows the viscosity temperature dependence of the package

atmosphere, approximately 0.25%/°C.

Activating both ST1 and ST2 simultaneously is not damaging.

ST1 and ST2 are fairly closely matched (±5%), but actuating

both simultaneously may result in a small apparent null bias

shift proportional to the degree of self-test mismatch.

ST1 and ST2 are activated by applying a voltage equal to VRATIO

to the ST1 and ST2 pins. The voltage applied to ST1 and ST2

must never be greater than AVCC.

CONTINUOUS SELF-TEST

The on-chip integration of the ADXRS620 gives it higher reliability

than is obtainable with any other high volume manufacturing

method. In addition, it is manufactured under a mature BiMOS

process with field-proven reliability. As an additional failure

detection measure, a power-on self-test can be performed.

However, some applications may warrant continuous self-test

while sensing rate. Details outlining continuous self-test techniques

are also available in the AN-768 Application Note at analog.com.

1 700000 0 000 O 00 OO 00 CO *00 OO 70 000 O 700000 ” i L {7 ORDERING GUIDE

ADXRS620

Rev. B | Page 11 of 12

OUTLINE DIMENSIONS

7 6 5 4 3

TOP VIEW

DETAIL A

BALL DIAMETER

0.60

0.55

.50

0.60 MAX

0.25 MIN

COPLANARITY

0.15

2 1

*A1 CORNER

INDEX AREA

3.20 MAX

2.50 MIN

*BALL A1 IDENTIFIER IS GOLD PLATED AND CONNECTED

TO THE D/A PAD INTERNALLY VIA HOLES.

10-26-2009-B

7.05

6.85 SQ

6.70

A1 BALL

CORNER

BOTTOM VIEW

DETAIL A

0.80

BSC

4.80

BSC SQ

SEATING

PLANE

3.80 MAX

Figure 24. 32-Lead Ceramic Ball Grid Array [CBGA]

(BG-32-3)

Dimensions shown in millimeters

ORDERING GUIDE

Model1, 2 Temperature Range Package Description Package Option

ADXRS620BBGZ –40°C to +105°C 32-Lead Ceramic Ball Grid Array (CBGA) BG-32-3

ADXRS620BBGZ-RL –40°C to +105°C 32-Lead Ceramic Ball Grid Array (CBGA) BG-32-3

ADXRS620WBBGZA –40°C to +105°C 32-Lead Ceramic Ball Grid Array (CBGA) BG-32-3

ADXRS620WBBGZA-RL –40°C to +105°C 32-Lead Ceramic Ball Grid Array (CBGA) BG-32-3

EVAL-ADXRS620Z Evaluation Board

1 Z = RoHS Compliant Part.

2 W = Qualified for Automotive Applications.

AUTOMOTIVE PRODUCTS

The ADXRS620W models are available with controlled manufacturing to support the quality and reliability requirements of automotive

applications. Note that these automotive models may have specifications that differ from the commercial models; therefore, designers

should review the Specifications section of this data sheet carefully. Only the automotive grade products shown are available for use in

automotive applications. Contact your local Analog Devices account representative for specific product ordering information and to

obtain the specific Automotive Reliability reports for these models.

ANALOG DEVICES www.analng.cam

ADXRS620

Rev. B | Page 12 of 12

NOTES

registered trademarks are the property of their respective owners.

D08887-0-9/10(B)

Analog Devices Inc. 的 ADXRS620 规格书

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