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In summary, Omron’s mass flow sensor MEMS use thermopiles to measure the temperature difference caused by the gas flow across them. This temperature difference, being directly proportional to the mass flow of the gas, is used by the MEMS device to output a voltage proportional to gas mass flow. Omron’s mass flow sensors are ideal for most applications where measuring the mass flow of gases is required.
PTM Published on: 2011-12-07
